|
NO
|
Parameter
|
6inch spec
|
5inch spec
|
|
1
|
Epi layer dopant
|
N,N+:Antimony,Arsine,phosphorus
|
N,N+:phosphorus,Arsine
|
2
|
Epi orientation
|
<100>,<111>
|
<100>,<111>
|
3
|
Epi resistivity
|
0.5～120Ω▪cm
|
0.5～120Ω▪cm
|
|
4
|
Epi Deviation of resistivity center value
|
≤±2%
|
≤±2%
|
|
5
|
Epi Resistivity uniformity
|
≤±3%
|
≤±3%
|
|
6
|
Epi thickness
|
3～150μm
|
3-150μm
|
|
7
|
Epi thickness central deviation
|
≤±1%
|
≤±1%
|
8
|
Epi thickness uniformity
|
≤±3%
|
≤±3%
|
9
|
BOW/Warp
|
-60～60
|
-50～50
|
10
|
TTV
|
≤18
|
≤10
|
|
11
|
Sacking Fanlt
|
≤5/cm2
|
≤5/cm2
|
|
12
|
Slip
|
＜5条，同时总长度≤硅片直径的1/2
|
＜5条，同时总长度≤硅片直径的1/2
|
|
13
|
Haze
|
NONE
|
NONE
|
14
|
Scratch
|
NONE
|
NONE
|
15
|
Pit、orangepoel、flaw 、Crow,s claw
|
NONE
|
NONE
|
|
16
|
Bdge chip
|
NONE
|
NONE
|
|
17
|
Foreign matter
|
NONE
|
NONE
|
|
18
|
Back contamination
|
NONE
|
NONE
|
|
19
|
Piont Defect
|
NONE
|
NONE
|
