| NO | Parameter | 4inch、5inch、6inch spec | |
| 1 | Dopant |
N,N+:Antimony,Arsine,phosphorus P,P+:Boron |
|
| 2 | Orientation |
<100>,<111>,<110> |
|
| 3 | Resistivity | 0.001～1.0～100～10000Ω▪cm | |
| 4 | Resistivity uniformitr |
≤25% |
|
| 5 | Thickness | 150～5000μm | |
| 6 | TTV | ≤5um | |
|
7 |
STIR | ≤1.5um | |
| 8 | WARP/BOW | ≤35um | |
| 9 | Oxygen content |
8.0～18.0ppma |
|
| 10 | Carbon content | ＜1.0ppma | |
| 11 | Dislocation/oxide dislocation | ＜100ea/cm2 | |
| 12 | Slip | NONE | |
| 13 |
Surface:Haze、Scratch、Pit、orangepoel、flaw、Crow,s claw、Bdge chip、contamination |
NONE | |
| 14 | Reverse:Bdge chip、Scratch、Pit、flaw |
NONE |
|
| 15 |
Surface
particles |
≥0.2um的≤30um ≥0.5um的≤3um ≥0.3um的≤10um
|
|
| 16 | Surface metal |
≤5E10 |
- Tel:13705597336
Tel:13956270661 - E-mail:hsdianqi@vip.163.com
Fax：0559-4510020 - Huangshan Chipmirco Eletronics Co.,LTD
Add：NO.449 Xinxing road Qimen County
|
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